JPS5932182A - バイモルフ用圧電素子 - Google Patents

バイモルフ用圧電素子

Info

Publication number
JPS5932182A
JPS5932182A JP57141991A JP14199182A JPS5932182A JP S5932182 A JPS5932182 A JP S5932182A JP 57141991 A JP57141991 A JP 57141991A JP 14199182 A JP14199182 A JP 14199182A JP S5932182 A JPS5932182 A JP S5932182A
Authority
JP
Japan
Prior art keywords
piezoelectric
plate
piezoelectric element
bimorph
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57141991A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6412111B2 (en]
Inventor
Mitsuhiro Takada
光裕 高田
Keisuke Kageyama
恵介 景山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP57141991A priority Critical patent/JPS5932182A/ja
Publication of JPS5932182A publication Critical patent/JPS5932182A/ja
Publication of JPS6412111B2 publication Critical patent/JPS6412111B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP57141991A 1982-08-16 1982-08-16 バイモルフ用圧電素子 Granted JPS5932182A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57141991A JPS5932182A (ja) 1982-08-16 1982-08-16 バイモルフ用圧電素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57141991A JPS5932182A (ja) 1982-08-16 1982-08-16 バイモルフ用圧電素子

Publications (2)

Publication Number Publication Date
JPS5932182A true JPS5932182A (ja) 1984-02-21
JPS6412111B2 JPS6412111B2 (en]) 1989-02-28

Family

ID=15304848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57141991A Granted JPS5932182A (ja) 1982-08-16 1982-08-16 バイモルフ用圧電素子

Country Status (1)

Country Link
JP (1) JPS5932182A (en])

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
US5281888A (en) * 1992-03-17 1994-01-25 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having auxiliary electrode disposed between piezoelectric/electrostrictive layer and substrate
US5430344A (en) * 1991-07-18 1995-07-04 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia
US5617127A (en) * 1992-12-04 1997-04-01 Ngk Insulators, Ltd. Actuator having ceramic substrate with slit(s) and ink jet print head using the actuator
US5834879A (en) * 1996-01-11 1998-11-10 Wac Data Services Co., Ltd. Stacked piezoelectric actuator
JP2006203304A (ja) * 2005-01-18 2006-08-03 Hitachi Media Electoronics Co Ltd 圧電薄膜共振器及びそれを用いた発振器並びにそれを内蔵した半導体集積回路
US7535155B2 (en) * 2004-08-24 2009-05-19 Taiheiyo Cement Corporation Piezoelectric device and piezoelectric switch provided with the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55135802A (en) * 1979-04-04 1980-10-23 Quantel Sa Thick optical element having variable curvature
JPS55139629A (en) * 1979-04-16 1980-10-31 Sony Corp Supporting structure of magnetic head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55135802A (en) * 1979-04-04 1980-10-23 Quantel Sa Thick optical element having variable curvature
JPS55139629A (en) * 1979-04-16 1980-10-31 Sony Corp Supporting structure of magnetic head

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
US5681410A (en) * 1990-07-26 1997-10-28 Ngk Insulators, Ltd. Method of producing a piezoelectric/electrostrictive actuator
US5430344A (en) * 1991-07-18 1995-07-04 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia
US5691594A (en) * 1991-07-18 1997-11-25 Ngk Insulators, Ltd. Piezoelectric/electrostricitve element having ceramic substrate formed essentially of stabilized zirconia
US5281888A (en) * 1992-03-17 1994-01-25 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element having auxiliary electrode disposed between piezoelectric/electrostrictive layer and substrate
US5617127A (en) * 1992-12-04 1997-04-01 Ngk Insulators, Ltd. Actuator having ceramic substrate with slit(s) and ink jet print head using the actuator
US5834879A (en) * 1996-01-11 1998-11-10 Wac Data Services Co., Ltd. Stacked piezoelectric actuator
US7535155B2 (en) * 2004-08-24 2009-05-19 Taiheiyo Cement Corporation Piezoelectric device and piezoelectric switch provided with the same
JP2006203304A (ja) * 2005-01-18 2006-08-03 Hitachi Media Electoronics Co Ltd 圧電薄膜共振器及びそれを用いた発振器並びにそれを内蔵した半導体集積回路

Also Published As

Publication number Publication date
JPS6412111B2 (en]) 1989-02-28

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